Wafer Spin Cleaner×マック産業機器 - List of Manufacturers, Suppliers, Companies and Products

ME-5000R Fully Automatic Wafer Spin Cleaning System

Full automatic spin cleaning device for 300mm/8-inch wafers, glass.

This device manually sets a wafer cassette into the main body, sends the stored target work to the spin cleaning section using a robot, and performs two-fluid cleaning, ultrasonic cleaning, and N2 blow drying while spinning, before storing it back in the wafer cassette.

• Company：マック産業機器 テクノロジーセンター
• Price：10 million yen-50 million yen

• Other semiconductor manufacturing equipment